Realtime CMP wafer polishing pressure mapping

7 May 2003 Test & Measurement Access Control & Identity Management News & Events

Sensor Products has introduced Tactilus, a new electronic tactile force and pressure indicating sensor. Tactilus allows an engineer to monitor precisely how force is disbursed between any two contacting surfaces in realtime. According to the company, Tactilus is a valuable aid for R&D and QC/QA in determining proper pressures in wafer polishing as well as in wafer bonding pressure distribution.

"The system will aid in determining precise pressure distribution for not only the actual wafer bonding process," says senior technical manager Jeffrey Stark, "but also for proper polishing head contact pressures. Balancing contact pressures between the bonding head/wafer interface or polishing head/wafer interface during machine set-up can help maximise yields and machine utilisation."

"Tactilus is a Windows-based system that consists of an electronic sensor element 'skin', an interface controller, and software," continues Stark. "The sensor skin is essentially a thin flexible sheet that is densely packed with sensing points or pixels. These sensing points can be spaced as close as 1 mm apart and can collect data as rapidly as 60 000 times per second."

The Tactilus sensing element is only 10 mils, allowing adaptation over curved surfaces or invasive intolerant environments.

The sensor system is pre-calibrated and requires minimal user training prior to operation. System requirements are Windows 95 (and higher), 16 MB free disk space and 64 MB RAM.

For more information contact Bill Ebner, Sensor Products, 091 973 560 9092, [email protected], www.sensorprod.com/tactilus

Further reading:

Highest increase in global cyberattacks in two years
Information Security News & Events
Check Point Global Research released new data on Q2 2024 cyber-attack trends, noting a 30% global increase in Q2 2024, with Africa experiencing the highest average weekly per organisation.

Read more...

---

Gallagher Security releases OneLink
Gallagher Animal Management Products & Solutions Access Control & Identity Management
Gallagher Security has announced OneLink, a cloud-based solution that makes it faster, easier and more cost-effective to deploy security anywhere in the world, transforming how security can be delivered to remote sites and distributed infrastructure.

Read more...

---

Analyser and voltmeter capability added to portable instruments
Tamashi Technology Investments Test & Measurement
Anritsu Company had added Vector Network Analyzer and Vector Voltmeter measurements to their industry standard Site Master instruments.

Read more...

---

Marktech’s latest LEDs and photodiodes
NuVision Electronics Test & Measurement
Designed for precision sensing and emission tasks, Marktech’s optoelectronic lineup serves medical, industrial, aerospace, and environmental markets.

Read more...

---

MEMS air quality sensor
Future Electronics Test & Measurement
Bosch Sensortec’s BME690 is the latest-generation gas sensor that combines advanced monitoring capabilities with innovative artificial intelligence functionality.

Read more...

---

Suprema unveils BioStar Air
Suprema neaMetrics News & Events Access Control & Identity Management Infrastructure
Suprema launches BioStar Air, the first cloud-based access control platform designed to natively support biometric authentication and feature true zero-on-premise architecture. BioStar Air simplifies deployment and scales effortlessly to secure SMBs, multi-branch companies, and mixed-use buildings.

Read more...

---

The rise of AI-powered cybercrime and defence
Information Security News & Events AI & Data Analytics
Check Point Software Technologies launched its inaugural AI Security Report, offering an in-depth exploration of how cybercriminals are weaponising artificial intelligence (AI), alongside strategic insights defenders need to stay ahead.

Read more...

---

Telemetry retrofit for sustainable resource management
CST Electronics Test & Measurement
AquaMeter is a cost-effective secure telemetry retrofit that can easily be added to hundreds of millions of legacy mechanical water meters.

Read more...

---

True-RMS clamp meter measures 2500 A
Comtest Test & Measurement
The Fluke 376 FC True-RMS Clamp Meter with iFlex is the most advanced troubleshooting tool for industrial and commercial electricians.

Read more...

---

Latest wireless barcode scanner
Brady Corporation Test & Measurement
Brady has launched its new barcode scanner, the CR2100, which is a wireless handheld scanner utilising Bluetooth 5 LE for communication with a host device.

Read more...

---