Test & Measurement


MEMS pressure sensors

15 April 2009 Test & Measurement

Epcos has introduced a range of compact packaged sensors for barometric pressure measurement. With dimensions down to 1,7 x 1,7 x 0,9 mm, the T5000 and ASB1200E are optimised for absolute pressure measurement of 300 to 1200 mBar and cover a measurement range of 20 mV/V/Bar.

The heart of the pressure sensors is a piezo-resistive MEMS sensor chip manufactured by Aktiv Sensor, an Epcos subsidiary. They are packaged in the cost-effective CSMP (chip-sized MEMS package) packaging technology developed by Epcos. Also available is a sensor variant in a conventional package with a gel-protected stainless steel pressure port. With a footprint of only 3 x 3 mm, the ASB1200E SMD pressure sensor enables the further miniaturisation of barometric applications that are exposed to high humidity.



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