Manufacturing / Production Technology, Hardware & Services


MEMS AOI equipment

28 October 2009 Manufacturing / Production Technology, Hardware & Services

Vi Technology recently introduced the Reveal MEMS series, an automated optical inspection (AOI) machine designed specifically for MEMS components. This versatile equipment is able to detect various sizes of foreign materials or scratches and measure die positioning, rotation, tilt and other parameters.

Based on 15 years of expertise in AOI, the Reveal MEMS solution is an inline thorough inspection machine for MEMS packaging processes. It is designed with a robust granite-based gantry for high stability and features high-accuracy axes and a brand new optical acquisition system with a sub-micron pixel size. It accurately detects any foreign material size larger than 3 μm like silicon, alumina, human-related particles, etc, and ensures perfect cleanliness of the MEMS before its encapsulation. At the same time, the AOI inspects the structural integrity of the MEMS die by checking missing or damaged beams or wires, as well as its positioning (X, Y and rotation) within the package.

The Reveal MEMS equipment is a turnkey solution allowing either standalone use for small production batches or use as an integrated inline solution with customised handling equipment. It can therefore be adapted to any product type and size as well as any kind of carrier such as wafers, boats, trays, strips, etc.



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