Memsic's Tri-Axial accelerometer family initially includes three devices: the MXR9500GZ and MXR9150GZ are ±1,5g and ±5g accelerometers with ratiometric outputs resp. and the MXM9301GZ is a ±1g accelerometer with I²C interface. Packaged in a 16 pin 7 x 7 mm SMD format, the MX series are low noise dual and tri-axis accelerometers fabricated on a standard, sub-micron CMOS process. Each accelerometer is a complete sensing system with on-chip mixed-mode signal processing. The design is based on heat convection and requires no solid proof mass. This eliminates stiction and particle problems associated with capacitive-based devices and provide shock survival up to 50 000g. The Memsic accelerometer product line can measure both dynamic acceleration (eg vibration) and static acceleration (eg gravity). Initial offset is as tight as ±0,1g and initial sensitivity errors are as low as 5%.
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