19 November 2014Manufacturing / Production Technology, Hardware & Services
The Prexision-80 display mask writer from Micronic Mydata offers substantial improvement in image quality, which improves production efficiency for mask makers and enables manufacturing of future display products. It supercedes the Prexision-8 as the company’s most advanced mask writer.
By enabling utilisation of the full sweep length in single-pass writing, the new system can boost productivity by up to 600% compared to earlier models. It is equipped with two writing modes: HA mode for high-accuracy applications; and HT mode for when productivity is most important.
Prexision-80 is the beneficiary of technical improvements such as a new servo system, new sweep electronics and ‘X-movement’: thanks to a state-of-the-art X-carriage controlled by glass scales and linear encoders, the platform is more stable and robust, resulting in better placement performance and hence Mura reduction.
Regardless of mask flatness and the presence of particles, Z-correction ensures superior performance in written overlay, thus eliminating the dominant source of overlay/registration errors. Another improvement is a flexible overlap capability, making it possible to shrink the overlap area to make sure that pattern stitching occurs where no sensitive pattern is located.
To further reduce the risk of Mura, the machine includes a new optical head that enhances both focus control and image stability. Together with a new sweep generation board, this means that CD (critical dimensioning) and positioning within the sweep have been significantly improved to meet the industrial roadmap.
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