Electronics Technology


Integrated MEMS-based gyroscope

20 November 2002 Electronics Technology

Analog Devices' MEMs-based gyroscope is claimed to be the first commercially available device to integrate both an angular rate sensor and signal processing electronics onto a single piece of silicon. The company's iMEMS ADXRS gyro integrates the sensor structure and all necessary signal conditioning circuitry onto a single integrated circuit. It is mounted inside a small 7 x 7 x 3 mm ball grid array (BGA) package, and consumes only 5 mA of current at 5 V. Analog Devices used its iMEMS (integrated micro electro mechanical system) surface micromachining process to achieve this technology.

"Analog Devices' ADXRS gyro has a very low noise output which enables us to use it in many applications to augment GPS receivers where critical location information is required during temporary disruptions of GPS signals," said Michael S. Perlmutter, executive vice president, Fibersense Technology, a world-leader in advanced inertial navigation and stabilisation technology. "In our product designs, reliability is critical and immunity to shock and vibration is a must. Competitive solutions were not able to match Analog Devices in terms of size, performance or reputation for MEMS reliability. For greater reliability assurance, the new device is also the only commercially available gyro with a full mechanical and electronic self-test feature that can operate while the sensor is still active."

ADI says the iMEMs process have resulted in a MEMS sensor that provides extraordinary immunity to shock and vibration - the ADXRS gyro can deliver stable output in the presence of mechanical noise up to 2000 g over a wide frequency range.

For more information contact Analog Data Products, 011 259 9400.





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